At this point in this example, there should be exactly 3 boxes (or polygons, depending on how they were created) selected - you can verify this by looking at the Select Counts in the lower right part of the screen:
Then select the three squares, either by Shift-Clicking on each of the three, or by left-dragging a window across the three squares, but not the larger, enclosing rectangle - you don't want that one selected. If the top, left-click option is not "Select Element", then get to Select mode by either pressing "Escape", or click toolbar icon "Select/Edit".
Well, first I select each of the three rectangles, in this case, by making sure I am in "Select" mode by checking the Mouse Help: LayoutEditor is, by default, smart about these two illegal polygon types, and will try to detect and repair polygons of this type - See the options in the Preferences/ Settings under Shapes : General : Polygon Checks.Ī common question, then is how do you create a shape with a “cut out” or hole in it, such as shown on the right above? In LayoutEditor, there are a few different ways.Ĭonsider the large rectangle here, and say I want to have 3 square holes cut through that rectangle, as drawn. Self-intersecting polygons, such as shown here, are not legal in any known mask-making or e-beam system.Īlthough self-intersection or self-overlapping polygons are illegal, self-touching polygons, in which one or more sides touches another side, but not overlaps, are allowed, and are a way to have “holes” inside of other shapes. It is possible to create various illegal polygons. There are some very important details about polygons of which you should be aware: Most mask shops specifically request that you do not send them flattened data (that is, data without hierarchy) because it adds too much to their overhead. It also makes design modifications much easier, and many times, it’s necessary to do design several iterations of design modifications to get your final desired lithography.
For certain more advanced options such as proximity correction, the time/cost savings can be significant. It often makes both mask-masking and e-beam writing faster, and thus cheaper. To the extent reasonably possible, use hierarchy in your design. Let’s dig in a bit deeper with some more details. OK, so we’ve covered the basic objects, and how they are created, and we’ve covered hierarchical design, view levels and layers.
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